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Thermal Management for Semiconductor

Fluorack™ FRK-fluids are non-conductive, non-flammable, stable, and have good compatibility to electronic compounents. Those fluids can be deployed to directly immerse the IT hardwares in a dielectric liquid media, and heat generated by the electronic components is directly and efficiently transferred to the fluid. The superior efficiency achieved by direct liquid cooling can help to improve PUE(Power Usage Effectiveness) to be lower than 1.1, while reducing costs and dependency on natural resources. The non-flammble and low GWP features of FRK-fluids can meet the demands from industry about reliability and sustainbility.


Many of today's greatest technological advancements have one thing in common: a need to manage heat. Whether it's controlling process temperatures in semiconductor wafer manufacturing or other applications, heat transfer is critical to a wide range of applications that enable our modern lives. New equipment designs put more demands on the dielectric fluids used to maintain proper temperatures.


Fluorack™ FRK Engineered Fluids are ideally suited to address these concerns. These nonflammable, non-corrosive materials offer an outstanding balance of heat transfer efficiency and operating safety. Because of this, these inert cooling fluids can be widely used for thermal management in many critical semiconductor manufacturing operations, from chuck cooling and automated testing in etching, ion implantation, photolithography and more. At many stages in the semiconductor fabrication process, these heat transfer fluids can provide an efficient, cost-effective, low-maintenance way of controlling process temperatures. Furthmore, FRK fluids don't require deionization like aqueous coolants, and can provide excellent temperature uniformity.


Fluorack™ FRK Engineered Fluids are developed not only to deliver excellent performance in many heat transfer applications, but to do so in a way that doesn't compromise worker safety or environmental sustainability. FRK Engineered Fluids are dielectric and non-flammable, offer a variety of operating temperature ranges and are low-maintenance, low-mess alternatives to traditional cooling fluids such as water, water glycol or oils used for heat transfer. And they work in many applications. If you're looking for a better way to beat the heat, contact Fluorack for help.


Product:

FRK-110

Features:

  • High dielectric strength

  • Wide range of operating temperature

  • Excellent thermal stability and chemical inerness

  • Materials compatibility

  • Low toxicity and non-flammable